Assignee
ADVANCED ENERGY IND INC
US·300 granted patents·94 pending applications·9,539 citations·filing 1989–2025
Top patents by PatentIndex Score
394 records- 0199US11804362B2Frequency tuning for modulated plasma systemsADVANCED ENERGY IND INC·Filed 2021·Granted Oct 31, 2023·8 cites·20 claims
- 0299US11515123B2Apparatus and system for modulated plasma systemsADVANCED ENERGY IND INC·Filed 2020·Granted Nov 29, 2022·6 cites·14 claims
- 0399US10720305B2Plasma delivery system for modulated plasma systemsADVANCED ENERGY IND INC·Filed 2018·Granted Jul 21, 2020·47 cites·23 claims
- 0499US10074518B2Apparatus for controlled overshoot in a RF generatorADVANCED ENERGY IND INC·Filed 2017·Granted Sep 11, 2018·65 cites·20 claims
- 0599US9741544B2System and method for control of high efficiency generator source impedanceADVANCED ENERGY IND INC·Filed 2015·Granted Aug 22, 2017·68 cites·12 claims
- 0699US9578731B2Systems and methods for obtaining information about a plasma loadADVANCED ENERGY IND INC·Filed 2015·Granted Feb 21, 2017·49 cites·24 claims
- 0799US9577516B1Apparatus for controlled overshoot in a RF generatorADVANCED ENERGY IND INC·Filed 2016·Granted Feb 21, 2017·68 cites·18 claims
- 0899US9294100B2Frequency tuning system and method for finding a global optimumADVANCED ENERGY IND INC·Filed 2013·Granted Mar 22, 2016·55 cites·15 claims
- 0999US7305311B2Arc detection and handling in radio frequency power applicationsADVANCED ENERGY IND INC·Filed 2005·Granted Dec 4, 2007·156 cites·34 claims
- 1098US11942309B2Bias supply with resonant switchingADVANCED ENERGY IND INC·Filed 2022·Granted Mar 26, 2024·9 cites·12 claims
- 1198US11887812B2Bias supply with a single controlled switchADVANCED ENERGY IND INC·Filed 2020·Granted Jan 30, 2024·8 cites·3 claims
- 1298US11670487B1Bias supply control and data processingADVANCED ENERGY IND INC·Filed 2022·Granted Jun 6, 2023·14 cites·39 claims
- 1398US11610763B2Inter-period control system for plasma power delivery system and method of operating the sameADVANCED ENERGY IND INC·Filed 2021·Granted Mar 21, 2023·3 cites·20 claims
- 1498US11437221B2Spatial monitoring and control of plasma processing environmentsADVANCED ENERGY IND INC·Filed 2021·Granted Sep 6, 2022·16 cites·15 claims
- 1598US11282677B2Spatial monitoring and control of plasma processing environmentsADVANCED ENERGY IND INC·Filed 2020·Granted Mar 22, 2022·15 cites·17 claims
- 1698US11264209B2Application of modulating supplies in a plasma processing systemADVANCED ENERGY IND INC·Filed 2020·Granted Mar 1, 2022·13 cites·19 claims
- 1798US11011349B2System, method, and apparatus for controlling ion energy distribution in plasma processing systemsADVANCED ENERGY IND INC·Filed 2017·Granted May 18, 2021·49 cites·12 claims
- 1898US10896807B2Synchronization between an excitation source and a substrate bias supplyADVANCED ENERGY IND INC·Filed 2020·Granted Jan 19, 2021·58 cites·15 claims
- 1998US10811227B2Application of modulating supplies in a plasma processing systemADVANCED ENERGY IND INC·Filed 2018·Granted Oct 20, 2020·51 cites·31 claims
- 2098US10811228B2Control of plasma processing systems that include plasma modulating suppliesADVANCED ENERGY IND INC·Filed 2019·Granted Oct 20, 2020·57 cites·31 claims
- 2198US10811229B2Synchronization with a bias supply in a plasma processing systemADVANCED ENERGY IND INC·Filed 2019·Granted Oct 20, 2020·51 cites·13 claims
- 2298US10707055B2Spatial and temporal control of ion bias voltage for plasma processingADVANCED ENERGY IND INC·Filed 2018·Granted Jul 7, 2020·55 cites·23 claims
- 2398US10607813B2Synchronized pulsing of plasma processing source and substrate biasADVANCED ENERGY IND INC·Filed 2018·Granted Mar 31, 2020·104 cites·14 claims
- 2498US10332730B2Method for balancing consumption of targets in pulsed dual magnetron sputtering (DMS) processesADVANCED ENERGY IND INC·Filed 2017·Granted Jun 25, 2019·63 cites·8 claims
- 2598US10314156B2Switching amplifierADVANCED ENERGY IND INC·Filed 2017·Granted Jun 4, 2019·26 cites·19 claims
- 2698US10269540B1Impedance matching system and method of operating the sameADVANCED ENERGY IND INC·Filed 2018·Granted Apr 23, 2019·154 cites·18 claims
- 2798US10224184B2System and method for control of high efficiency generator source impedanceADVANCED ENERGY IND INC·Filed 2017·Granted Mar 5, 2019·53 cites·9 claims
- 2898US10194518B2Noise based frequency tuning and identification of plasma characteristicsADVANCED ENERGY IND INC·Filed 2017·Granted Jan 29, 2019·36 cites·12 claims
- 2998US9854659B2Noise based frequency tuning and identification of plasma characteristicsADVANCED ENERGY IND INC·Filed 2015·Granted Dec 26, 2017·38 cites·11 claims
- 3098US9852890B2Frequency tuning for pulsed radio frequency plasma processingADVANCED ENERGY IND INC·Filed 2017·Granted Dec 26, 2017·73 cites·17 claims
- 3198US9807863B1Switching amplifierADVANCED ENERGY IND INC·Filed 2016·Granted Oct 31, 2017·37 cites·24 claims
- 3298US9773644B2Power generator with frequency tuning for use with plasma loadsADVANCED ENERGY IND INC·Filed 2016·Granted Sep 26, 2017·37 cites·17 claims
- 3398US9711331B2Frequency tuning for pulsed radio frequency plasma processingADVANCED ENERGY IND INC·Filed 2017·Granted Jul 18, 2017·58 cites·17 claims
- 3498US9660613B2Impedance-matching network using BJT switches in variable-reactance circuitsADVANCED ENERGY IND INC·Filed 2015·Granted May 23, 2017·27 cites·19 claims
- 3598US9651957B1Adjustable non-dissipative voltage boosting snubber networkADVANCED ENERGY IND INC·Filed 2016·Granted May 16, 2017·73 cites·22 claims
- 3698US9620340B2Charge removal from electrodes in unipolar sputtering systemADVANCED ENERGY IND INC·Filed 2016·Granted Apr 11, 2017·75 cites·17 claims
- 3798US9558917B2Adjustable non-dissipative voltage boosting snubber network for achieving large boost voltagesADVANCED ENERGY IND INC·Filed 2016·Granted Jan 31, 2017·67 cites·32 claims
- 3898US9544987B2Frequency tuning for pulsed radio frequency plasma processingADVANCED ENERGY IND INC·Filed 2014·Granted Jan 10, 2017·71 cites·17 claims
- 3998US9520269B2Adjustable non-dissipative voltage boosting snubber network for achieving large boost voltagesADVANCED ENERGY IND INC·Filed 2015·Granted Dec 13, 2016·71 cites·21 claims
- 4098US9483066B2Adjustable non-dissipative voltage boosting snubber networkADVANCED ENERGY IND INC·Filed 2015·Granted Nov 1, 2016·67 cites·19 claims
- 4198US9287098B2Charge removal from electrodes in unipolar sputtering systemADVANCED ENERGY IND INC·Filed 2014·Granted Mar 15, 2016·70 cites·21 claims
- 4298US9224579B2Adjustable non-dissipative voltage boosting snubber network for achieving large boost voltagesADVANCED ENERGY IND INC·Filed 2014·Granted Dec 29, 2015·67 cites·11 claims
- 4398US8884180B2Over-voltage protection during arc recovery for plasma-chamber power suppliesADVANCED ENERGY IND INC·Filed 2013·Granted Nov 11, 2014·76 cites·14 claims
- 4498US8742669B2Passive power distribution for multiple electrode inductive plasma sourceADVANCED ENERGY IND INC·Filed 2012·Granted Jun 3, 2014·102 cites·12 claims
- 4598US7761247B2Arc detection and handling in radio frequency power applicationsADVANCED ENERGY IND INC·Filed 2007·Granted Jul 20, 2010·67 cites·22 claims
- 4698US6432260B1Inductively coupled ring-plasma source apparatus for processing gases and materials and method thereofADVANCED ENERGY IND INC·Filed 2000·Granted Aug 13, 2002·160 cites·58 claims
- 4798US5718813AEnhanced reactive DC sputtering systemADVANCED ENERGY IND INC·Filed 1993·Granted Feb 17, 1998·269 cites·48 claims
- 4897US12154759B2Apparatus to control a waveformADVANCED ENERGY IND INC·Filed 2023·Granted Nov 26, 2024·2 cites·12 claims
- 4997US12142460B2Control of plasma sheath with bias suppliesADVANCED ENERGY IND INC·Filed 2023·Granted Nov 12, 2024·3 cites·20 claims
- 5097US12009179B2Bias supply control and data processingADVANCED ENERGY IND INC·Filed 2023·Granted Jun 11, 2024·4 cites·18 claims
Showing the top 50 of 394 patent records by PatentIndex Score.
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