Assignee
ADVANCED MASK TECH CENTER GMBH & CO KG
DE·2 granted patents·0 citations·filing 2014–2020
Top patents by PatentIndex Score
2 records- 0142US11537039B2Photomask assembly with reflective photomask and method of manufacturing a reflective photomaskADVANCED MASK TECH CENTER GMBH & CO KG·Filed 2020·Granted Dec 27, 2022·0 cites·9 claims
- 0239US9405185B2Shape metrology for photomasksADVANCED MASK TECH CENTER GMBH & CO KG·Filed 2014·Granted Aug 2, 2016·0 cites·13 claims
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