Assignee
ADVANCED MASK TECHNOLOGY CT GMBH
DE·4 granted patents·3 pending applications·8 citations·filing 2006–2008
Top patents by PatentIndex Score
7 records- 0178US7354684B2Test pattern and method of evaluating the transfer properties of a test patternADVANCED MASK TECHNOLOGY CT GMBH·Filed 2007·Granted Apr 8, 2008·6 cites·17 claims
- 0254US7820343B2Method for producing a photomask, method for patterning a layer or layer stack and resist stack on a mask substrateADVANCED MASK TECHNOLOGY CT GMBH·Filed 2007·Granted Oct 26, 2010·2 cites·11 claims
- 0336US2008318139A1Mask Blank, Photomask and Method of Manufacturing a PhotomaskADVANCED MASK TECHNOLOGY CT GMBH·Filed 2008·Application pending·0 cites
- 0432US7811727B2Method for determining an exposure dose and exposure apparatusADVANCED MASK TECHNOLOGY CT GMBH·Filed 2006·Granted Oct 12, 2010·0 cites·20 claims
- 0532US7789964B2Method for cleaning a surface of a photomaskADVANCED MASK TECHNOLOGY CT GMBH·Filed 2006·Granted Sep 7, 2010·0 cites·17 claims
- 0628US2007263192A1Illumination system and a photolithography apparatus employing the systemADVANCED MASK TECHNOLOGY CT GMBH·Filed 2007·Application pending·0 cites
- 0721US2006236921A1Method of cleaning a substrate surface from a crystal nucleusADVANCED MASK TECHNOLOGY CT GMBH·Filed 2006·Application pending·0 cites
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