Assignee
ADVANCED METROLOGY SYSTEMS LLC
US·4 granted patents·22 citations·filing 2002–2006
Top patents by PatentIndex Score
4 records- 0173US7327468B2Opto-acoustic apparatus with optical heterodyning for measuring solid surfaces and thin filmsADVANCED METROLOGY SYSTEMS LLC·Filed 2002·Granted Feb 5, 2008·17 cites·41 claims
- 0256US7499183B2Method of measuring sub-micron trench structuresADVANCED METROLOGY SYSTEMS LLC·Filed 2004·Granted Mar 3, 2009·3 cites·17 claims
- 0356US7365864B2Method of determining properties of patterned thin film metal structures using transient thermal responseADVANCED METROLOGY SYSTEMS LLC·Filed 2003·Granted Apr 29, 2008·2 cites·30 claims
- 0437US7839509B2Method of measuring deep trenches with model-based optical spectroscopyADVANCED METROLOGY SYSTEMS LLC·Filed 2006·Granted Nov 23, 2010·0 cites·31 claims
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