Assignee
ADVANCED TECH MATERIALS
US·538 granted patents·96 pending applications·31,332 citations·filing 1986–2016
Top patents by PatentIndex Score
634 records- 0199US7437060B2Delivery systems for efficient vaporization of precursor source materialADVANCED TECH MATERIALS·Filed 2005·Granted Oct 14, 2008·561 cites·20 claims
- 0299US6909839B2Delivery systems for efficient vaporization of precursor source materialADVANCED TECH MATERIALS·Filed 2003·Granted Jun 21, 2005·610 cites·21 claims
- 0399US6600175B1Solid state white light emitter and display using sameADVANCED TECH MATERIALS·Filed 1996·Granted Jul 29, 2003·892 cites·26 claims
- 0499US6596079B1III-V nitride substrate boule and method of making and using the sameADVANCED TECH MATERIALS·Filed 2000·Granted Jul 22, 2003·427 cites·49 claims
- 0599US6445006B1Microelectronic and microelectromechanical devices comprising carbon nanotube components, and methods of making sameADVANCED TECH MATERIALS·Filed 1999·Granted Sep 3, 2002·522 cites·55 claims
- 0699US6156581AGaN-based devices using (Ga, AL, In)N base layersADVANCED TECH MATERIALS·Filed 1997·Granted Dec 5, 2000·507 cites·62 claims
- 0799US6089027AFluid storage and dispensing systemADVANCED TECH MATERIALS·Filed 1999·Granted Jul 18, 2000·216 cites·43 claims
- 0899US5518528AStorage and delivery system for gaseous hydride, halide, and organometallic group V compoundsADVANCED TECH MATERIALS·Filed 1994·Granted May 21, 1996·289 cites·62 claims
- 0998US7838329B2Antimony and germanium complexes useful for CVD/ALD of metal thin filmsADVANCED TECH MATERIALS·Filed 2007·Granted Nov 23, 2010·55 cites·21 claims
- 1098US7475588B2Apparatus and process for sensing fluoro species in semiconductor processing systemsADVANCED TECH MATERIALS·Filed 2005·Granted Jan 13, 2009·474 cites·64 claims
- 1198US7296460B2Apparatus and process for sensing fluoro species in semiconductor processing systemsADVANCED TECH MATERIALS·Filed 2005·Granted Nov 20, 2007·481 cites·23 claims
- 1298US7080545B2Apparatus and process for sensing fluoro species in semiconductor processing systemsADVANCED TECH MATERIALS·Filed 2002·Granted Jul 25, 2006·495 cites·81 claims
- 1398US6879876B2Liquid handling system with electronic information storageADVANCED TECH MATERIALS·Filed 2001·Granted Apr 12, 2005·142 cites·26 claims
- 1498US6749671B2Abatement of effluents from chemical vapor deposition processes using organometallic source reagentsADVANCED TECH MATERIALS·Filed 2003·Granted Jun 15, 2004·395 cites·20 claims
- 1598US6500487B1Abatement of effluent from chemical vapor deposition processes using ligand exchange resistant metal-organic precursor solutionsADVANCED TECH MATERIALS·Filed 1999·Granted Dec 31, 2002·417 cites·61 claims
- 1698US6488767B1High surface quality GaN wafer and method of fabricating sameADVANCED TECH MATERIALS·Filed 2001·Granted Dec 3, 2002·209 cites·51 claims
- 1798US6406519B1Gas cabinet assembly comprising sorbent-based gas storage and delivery systemADVANCED TECH MATERIALS·Filed 2000·Granted Jun 18, 2002·96 cites·66 claims
- 1898US6101816AFluid storage and dispensing systemADVANCED TECH MATERIALS·Filed 1998·Granted Aug 15, 2000·157 cites·75 claims
- 1998US5972430ADigital chemical vapor deposition (CVD) method for forming a multi-component oxide layerADVANCED TECH MATERIALS·Filed 1997·Granted Oct 26, 1999·417 cites·24 claims
- 2098US5973444ACarbon fiber-based field emission devicesADVANCED TECH MATERIALS·Filed 1998·Granted Oct 26, 1999·334 cites·52 claims
- 2198US5840897AMetal complex source reagents for chemical vapor depositionADVANCED TECH MATERIALS·Filed 1995·Granted Nov 24, 1998·275 cites·9 claims
- 2298US5679152AMethod of making a single crystals Ga*N articleADVANCED TECH MATERIALS·Filed 1994·Granted Oct 21, 1997·332 cites·18 claims
- 2398US5453494AMetal complex source reagents for MOCVDADVANCED TECH MATERIALS·Filed 1994·Granted Sep 26, 1995·276 cites·15 claims
- 2498US5204314AMethod for delivering an involatile reagent in vapor form to a CVD reactorADVANCED TECH MATERIALS·Filed 1991·Granted Apr 20, 1993·386 cites·25 claims
- 2597US7172096B2Liquid dispensing systemADVANCED TECH MATERIALS·Filed 2004·Granted Feb 6, 2007·82 cites·30 claims
- 2697US6596236B2Micro-machined thin film sensor arrays for the detection of H2 containing gases, and method of making and using the sameADVANCED TECH MATERIALS·Filed 2001·Granted Jul 22, 2003·129 cites·43 claims
- 2797US6533874B1GaN-based devices using thick (Ga, Al, In)N base layersADVANCED TECH MATERIALS·Filed 2000·Granted Mar 18, 2003·232 cites·34 claims
- 2897US6379748B1Tantalum amide precursors for deposition of tantalum nitride on a substrateADVANCED TECH MATERIALS·Filed 2000·Granted Apr 30, 2002·211 cites·16 claims
- 2997US6343476B1Gas storage and dispensing system comprising regulator interiorly disposed in fluid containment vessel and adjustable in situ thereinADVANCED TECH MATERIALS·Filed 2000·Granted Feb 5, 2002·94 cites·20 claims
- 3097US6015917ATantalum amide precursors for deposition of tantalum nitride on a substrateADVANCED TECH MATERIALS·Filed 1998·Granted Jan 18, 2000·317 cites·4 claims
- 3197US5993766AGas source and dispensing systemADVANCED TECH MATERIALS·Filed 1997·Granted Nov 30, 1999·156 cites·19 claims
- 3297US5976928AChemical mechanical polishing of FeRAM capacitorsADVANCED TECH MATERIALS·Filed 1997·Granted Nov 2, 1999·220 cites·69 claims
- 3397US5874747AHigh brightness electroluminescent device emitting in the green to ultraviolet spectrum and method of making the sameADVANCED TECH MATERIALS·Filed 1996·Granted Feb 23, 1999·443 cites·32 claims
- 3497US5704965AFluid storage and delivery system utilizing carbon sorbent mediumADVANCED TECH MATERIALS·Filed 1996·Granted Jan 6, 1998·180 cites·50 claims
- 3597US5362328AApparatus and method for delivering reagents in vapor form to a CVD reactor, incorporating a cleaning subsystemADVANCED TECH MATERIALS·Filed 1994·Granted Nov 8, 1994·417 cites·13 claims
- 3697US4853148AProcess and composition for drying of gaseous hydrogen halidesADVANCED TECH MATERIALS·Filed 1987·Granted Aug 1, 1989·60 cites·9 claims
- 3796US8796068B2Tellurium compounds useful for deposition of tellurium containing materialsADVANCED TECH MATERIALS·Filed 2013·Granted Aug 5, 2014·12 cites·10 claims
- 3896US8002880B2Gas storage and dispensing system with monolithic carbon adsorbentADVANCED TECH MATERIALS·Filed 2009·Granted Aug 23, 2011·32 cites·20 claims
- 3996US7960328B2Composition and method for recycling semiconductor wafers having low-k dielectric materials thereonADVANCED TECH MATERIALS·Filed 2006·Granted Jun 14, 2011·53 cites·23 claims
- 4096US7922824B2Oxidizing aqueous cleaner for the removal of post-etch residuesADVANCED TECH MATERIALS·Filed 2006·Granted Apr 12, 2011·57 cites·20 claims
- 4196US7910765B2Composition and method for low temperature deposition of silicon-containing films such as films including silicon, silicon nitride, silicon dioxide and/or silicon-oxynitrideADVANCED TECH MATERIALS·Filed 2010·Granted Mar 22, 2011·19 cites·20 claims
- 4296US7887883B2Composition and method for low temperature deposition of silicon-containing filmsADVANCED TECH MATERIALS·Filed 2010·Granted Feb 15, 2011·23 cites·8 claims
- 4396US7863203B2Monosilane or disilane derivatives and method for low temperature deposition of silicon-containing films using the sameADVANCED TECH MATERIALS·Filed 2008·Granted Jan 4, 2011·19 cites·16 claims
- 4496US7828274B2Method and apparatus to help promote contact of gas with vaporized materialADVANCED TECH MATERIALS·Filed 2009·Granted Nov 9, 2010·19 cites·17 claims
- 4596US7786320B2Composition and method for low temperature deposition of silicon-containing films such as films including silicon, silicon nitride, silicon dioxide and/or silicon-oxynitrideADVANCED TECH MATERIALS·Filed 2009·Granted Aug 31, 2010·29 cites·7 claims
- 4696US7713346B2Composition and method for low temperature deposition of silicon-containing filmsADVANCED TECH MATERIALS·Filed 2008·Granted May 11, 2010·31 cites·8 claims
- 4796US7323581B1Source reagent compositions and method for forming metal films on a substrate by chemical vapor depositionADVANCED TECH MATERIALS·Filed 2000·Granted Jan 29, 2008·56 cites·8 claims
- 4896US6997202B2Gas storage and dispensing system for variable conductance dispensing of gas at constant flow rateADVANCED TECH MATERIALS·Filed 2002·Granted Feb 14, 2006·67 cites·26 claims
- 4996US6991671B2Rectangular parallelepiped fluid storage and dispensing vesselADVANCED TECH MATERIALS·Filed 2002·Granted Jan 31, 2006·52 cites·111 claims
- 5096US6921062B2Vaporizer delivery ampouleADVANCED TECH MATERIALS·Filed 2002·Granted Jul 26, 2005·189 cites·33 claims
Showing the top 50 of 634 patent records by PatentIndex Score.
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