Assignee
ADVANCED THERMAL SCIENCES
US·5 granted patents·1,136 citations·filing 2003–2006
Top patents by PatentIndex Score
5 records- 0199US7442275B2Lateral temperature equalizing system for large area surfaces during processingADVANCED THERMAL SCIENCES·Filed 2006·Granted Oct 28, 2008·545 cites·6 claims
- 0299US7195693B2Lateral temperature equalizing system for large area surfaces during processingADVANCED THERMAL SCIENCES·Filed 2003·Granted Mar 27, 2007·549 cites·5 claims
- 0389US7152426B1Thermal control systems for process tools requiring operation over wide temperature rangesADVANCED THERMAL SCIENCES·Filed 2005·Granted Dec 26, 2006·15 cites·3 claims
- 0487US7337625B1Thermal control systems for process tools requiring operation over wide temperature rangesADVANCED THERMAL SCIENCES·Filed 2006·Granted Mar 4, 2008·12 cites·3 claims
- 0568US6993918B1Thermal control systems for process tools requiring operation over wide temperature rangesADVANCED THERMAL SCIENCES·Filed 2004·Granted Feb 7, 2006·15 cites·11 claims
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