Assignee
ADVANTAGE PROD TECH
US·5 granted patents·527 citations·filing 1986–1988
Top patents by PatentIndex Score
5 records- 0190US4938815ASemiconductor substrate heater and reactor process and apparatusADVANTAGE PROD TECH·Filed 1988·Granted Jul 3, 1990·359 cites·15 claims
- 0289US4778559ASemiconductor substrate heater and reactor process and apparatusADVANTAGE PROD TECH·Filed 1986·Granted Oct 18, 1988·96 cites·27 claims
- 0376US5044314ASemiconductor wafer processing apparatusADVANTAGE PROD TECH·Filed 1988·Granted Sep 3, 1991·47 cites·12 claims
- 0453US4891335ASemiconductor substrate heater and reactor process and apparatusADVANTAGE PROD TECH·Filed 1988·Granted Jan 2, 1990·19 cites·12 claims
- 0535US4956046ASemiconductor substrate treating methodADVANTAGE PROD TECH·Filed 1988·Granted Sep 11, 1990·6 cites·1 claims
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