Assignee

AHN CHANNING C

US·1 granted patent·13 citations·filing 1991–1991

Technology mixC23C1 C30B1 G01N1 H01J1

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1 record

0154US5148025AIn situ composition analysis during growth vapor depositionAHN CHANNING C·Filed 1991·Granted Sep 15, 1992·13 cites·6 claims

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