Assignee
AK OPTICS TECH CO LTD
CN·4 granted patents·4 citations·filing 2014–2014
Top patents by PatentIndex Score
4 records- 0161US11187649B2Method for conducting optical measurement usingfull Mueller matrix ellipsometerAK OPTICS TECH CO LTD·Filed 2014·Granted Nov 30, 2021·1 cites·7 claims
- 0257US10957564B2Self-calibration apparatus and method for real-time temperature measurement system of MOCVD deviceAK OPTICS TECH CO LTD·Filed 2014·Granted Mar 23, 2021·2 cites·16 claims
- 0356US10731973B2Apparatus for automatically and quickly detecting two-dimensional morphology for wafer substrate in real timeAK OPTICS TECH CO LTD·Filed 2014·Granted Aug 4, 2020·1 cites·18 claims
- 0436US10908024B2Apparatus and method for online and real-time detection of temperature of epitaxial waferAK OPTICS TECH CO LTD·Filed 2014·Granted Feb 2, 2021·0 cites·10 claims
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