Assignee

ALBERT BENSELY

US·1 granted patent·1 citations·filing 2011–2011

Technology mixC23C1 C23F1 G03F1 H01L1 H10P1

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1 record

0156US9329497B2Substrate table, lithographic apparatus and device manufacturing methodALBERT BENSELY·Filed 2011·Granted May 3, 2016·1 cites·15 claims

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