Assignee
AMTECH SYSTEMS INC
US·10 granted patents·5 pending applications·715 citations·filing 1986–2014
Top patents by PatentIndex Score
15 records- 0194US5364667APhoto-assisted chemical vapor deposition methodAMTECH SYSTEMS INC·Filed 1993·Granted Nov 15, 1994·524 cites·2 claims
- 0286US5215588APhoto-CVD systemAMTECH SYSTEMS INC·Filed 1992·Granted Jun 1, 1993·70 cites·9 claims
- 0366US6537010B2Wafer boat support and method for twin tower wafer boat loaderAMTECH SYSTEMS INC·Filed 2001·Granted Mar 25, 2003·14 cites·13 claims
- 0465US5765982AAutomatic wafer boat loading system and methodAMTECH SYSTEMS INC·Filed 1995·Granted Jun 16, 1998·29 cites·13 claims
- 0561US2015021389A1Vehicle tolling system with occupancy detectionAMTECH SYSTEMS INC·Filed 2014·Application pending·0 cites
- 0659US2014057387A1Systems and Methods for Depositing and Charging Solar Cell LayersAMTECH SYSTEMS INC·Filed 2013·Application pending·0 cites
- 0759US2014057388A1Systems and Methods for Depositing and Charging Solar Cell LayersAMTECH SYSTEMS INC·Filed 2013·Application pending·0 cites
- 0857US2014150850A1Solar cell coatingAMTECH SYSTEMS INC·Filed 2012·Application pending·0 cites
- 0955US6143477ADual wavelength UV lamp reactor and method for cleaning/ashing semiconductor wafersAMTECH SYSTEMS INC·Filed 1998·Granted Nov 7, 2000·23 cites·8 claims
- 1053US9520531B2Systems and methods for depositing and charging solar cell layersAMTECH SYSTEMS INC·Filed 2013·Granted Dec 13, 2016·0 cites·21 claims
- 1153US5888048AAutomatic wafer boat loadingAMTECH SYSTEMS INC·Filed 1998·Granted Mar 30, 1999·17 cites·4 claims
- 1253US2013133578A1Systems for charging solar cell layersAMTECH SYSTEMS INC·Filed 2012·Application pending·0 cites
- 1351US6565304B2Wafer boat elevator system and methodAMTECH SYSTEMS INC·Filed 2001·Granted May 20, 2003·5 cites·16 claims
- 1448US4767251ACantilever apparatus and method for loading wafer boats into cantilever diffusion tubesAMTECH SYSTEMS INC·Filed 1986·Granted Aug 30, 1988·22 cites·22 claims
- 1542US6352399B1Twin tower wafer boat loading system and methodAMTECH SYSTEMS INC·Filed 1999·Granted Mar 5, 2002·11 cites·28 claims
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →