Assignee

ANTTILA ASKO

FI·1 granted patent·60 citations·filing 1989–1989

Technology mixC23C1 H01J1

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0183US5078848AProcedure and apparatus for the coating of materials by means of a pulsating plasma beamANTTILA ASKO·Filed 1989·Granted Jan 7, 1992·60 cites·7 claims

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