Assignee
APET CO LTD
KR·1 granted patent·2 pending applications·0 citations·filing 2023–2024
Top patents by PatentIndex Score
3 records- 0155US2025010378A1Chuck assemblyAPET CO LTD·Filed 2024·Application pending·0 cites
- 0254US2024404842A1Substrate processing apparatusAPET CO LTD·Filed 2024·Application pending·0 cites
- 0351US12266549B2Fluid supply nozzle for semiconductor substrate treatment and semiconductor substrate treatment apparatus having the sameAPET CO LTD·Filed 2023·Granted Apr 1, 2025·0 cites·7 claims
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