Assignee
APLEX GROUP
US·4 granted patents·229 citations·filing 1997–1997
Top patents by PatentIndex Score
4 records- 0187US5934974AIn-situ monitoring of polishing pad wearAPLEX GROUP·Filed 1997·Granted Aug 10, 1999·86 cites·31 claims
- 0286US5980368APolishing tool having a sealed fluid chamber for support of polishing padAPLEX GROUP·Filed 1997·Granted Nov 9, 1999·71 cites·22 claims
- 0379US6062959APolishing system including a hydrostatic fluid bearing supportAPLEX GROUP·Filed 1997·Granted May 16, 2000·42 cites·10 claims
- 0468US6080040AWafer carrier head with inflatable bladder and attack angle control for polishingAPLEX GROUP·Filed 1997·Granted Jun 27, 2000·30 cites·20 claims
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