Assignee
APPILED MATERIALS INC
US·3 granted patents·94 citations·filing 2001–2005
Top patents by PatentIndex Score
3 records- 0194US7464917B2Ampoule splash guard apparatusAPPILED MATERIALS INC·Filed 2005·Granted Dec 16, 2008·26 cites·26 claims
- 0292US6676760B2Process chamber having multiple gas distributors and methodAPPILED MATERIALS INC·Filed 2001·Granted Jan 13, 2004·55 cites·22 claims
- 0368US7430104B2Electrostatic chuck for wafer metrology and inspection equipmentAPPILED MATERIALS INC·Filed 2003·Granted Sep 30, 2008·13 cites·26 claims
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