Assignee

APPLIED INTEGRATED SYSTEMS & S

DE·1 granted patent·30 citations·filing 1999–1999

Technology mixG03F1 H01J1 Y10S1

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0170US6107207AProcedure for generating information for producing a pattern defined by design informationAPPLIED INTEGRATED SYSTEMS & S·Filed 1999·Granted Aug 22, 2000·30 cites·12 claims

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