Assignee
APPLIED MATERIALS ISRAEL LTD
IL·480 granted patents·115 pending applications·2,147 citations·filing 2002–2025
Top patents by PatentIndex Score
595 records- 0199US9922796B1Method for inspecting a specimen and charged particle multi-beam deviceAPPLIED MATERIALS ISRAEL LTD·Filed 2016·Granted Mar 20, 2018·55 cites·29 claims
- 0297US7696497B2Focusing system and method for a charged particle imaging systemAPPLIED MATERIALS ISRAEL LTD·Filed 2005·Granted Apr 13, 2010·43 cites·30 claims
- 0396US10903044B1Filling empty structures with deposition under high-energy SEM for uniform DE layeringAPPLIED MATERIALS ISRAEL LTD·Filed 2020·Granted Jan 26, 2021·8 cites·20 claims
- 0495US11404244B1High-resolution x-ray spectroscopy surface material analysisAPPLIED MATERIALS ISRAEL LTD·Filed 2021·Granted Aug 2, 2022·5 cites·20 claims
- 0595US11366072B2Detecting backscattered electrons in a multibeam charged particle columnAPPLIED MATERIALS ISRAEL LTD·Filed 2020·Granted Jun 21, 2022·4 cites·16 claims
- 0695US9666412B1Method for charging and imaging an objectAPPLIED MATERIALS ISRAEL LTD·Filed 2016·Granted May 30, 2017·18 cites·12 claims
- 0795US9653254B2Particle-optical systems and arrangements and particle-optical components for such systems and arrangementsAPPLIED MATERIALS ISRAEL LTD·Filed 2016·Granted May 16, 2017·33 cites·22 claims
- 0895US9099282B2Focusing a charged particle imaging systemAPPLIED MATERIALS ISRAEL LTD·Filed 2014·Granted Aug 4, 2015·19 cites·38 claims
- 0995US7619203B2High throughput multi beam detection system and methodAPPLIED MATERIALS ISRAEL LTD·Filed 2007·Granted Nov 17, 2009·28 cites·21 claims
- 1095US7468506B2Spot grid array scanning systemAPPLIED MATERIALS ISRAEL LTD·Filed 2006·Granted Dec 23, 2008·55 cites·20 claims
- 1194US11307150B2Automatic optimization of an examination recipeAPPLIED MATERIALS ISRAEL LTD·Filed 2020·Granted Apr 19, 2022·4 cites·20 claims
- 1294US11199401B1End-point detection for similar adjacent materialsAPPLIED MATERIALS ISRAEL LTD·Filed 2020·Granted Dec 14, 2021·4 cites·20 claims
- 1394US11022566B1Examination of a semiconductor specimenAPPLIED MATERIALS ISRAEL LTD·Filed 2020·Granted Jun 1, 2021·13 cites·29 claims
- 1494US10453645B2Method for inspecting a specimen and charged particle multi-beam deviceAPPLIED MATERIALS ISRAEL LTD·Filed 2016·Granted Oct 22, 2019·9 cites·20 claims
- 1594US10386311B1System and method for defect detection using multi-spot scanningAPPLIED MATERIALS ISRAEL LTD·Filed 2017·Granted Aug 20, 2019·10 cites·16 claims
- 1694US9530199B1Technique for measuring overlay between layers of a multilayer structureAPPLIED MATERIALS ISRAEL LTD·Filed 2015·Granted Dec 27, 2016·12 cites·15 claims
- 1794US7902849B2Apparatus and method for test structure inspectionAPPLIED MATERIALS ISRAEL LTD·Filed 2007·Granted Mar 8, 2011·80 cites·10 claims
- 1894US7504622B2High throughput multi beam detection system and methodAPPLIED MATERIALS ISRAEL LTD·Filed 2007·Granted Mar 17, 2009·34 cites·20 claims
- 1994US7468507B2Optical spot grid array scanning systemAPPLIED MATERIALS ISRAEL LTD·Filed 2006·Granted Dec 23, 2008·37 cites·18 claims
- 2094US7375326B2Method and system for focusing a charged particle beamAPPLIED MATERIALS ISRAEL LTD·Filed 2005·Granted May 20, 2008·30 cites·22 claims
- 2194US7285779B2Methods of scanning an object that includes multiple regions of interest using an array of scanning beamsAPPLIED MATERIALS ISRAEL LTD·Filed 2005·Granted Oct 23, 2007·30 cites·18 claims
- 2293US11379972B2Detecting defects in semiconductor specimens using weak labelingAPPLIED MATERIALS ISRAEL LTD·Filed 2020·Granted Jul 5, 2022·5 cites·19 claims
- 2393US11195267B1Multi-perspective wafer analysis using an acousto-optic deflectorAPPLIED MATERIALS ISRAEL LTD·Filed 2020·Granted Dec 7, 2021·4 cites·20 claims
- 2493US9286675B1Iterative defect filtering processAPPLIED MATERIALS ISRAEL LTD·Filed 2014·Granted Mar 15, 2016·23 cites·20 claims
- 2593US7796807B2Optical inspection apparatus for substrate defect detectionAPPLIED MATERIALS ISRAEL LTD·Filed 2009·Granted Sep 14, 2010·18 cites·9 claims
- 2693US7535001B2Method and system for focusing a charged particle beamAPPLIED MATERIALS ISRAEL LTD·Filed 2007·Granted May 19, 2009·29 cites·22 claims
- 2793US7297965B2Method and apparatus for sample formation and microanalysis in a vacuum chamberAPPLIED MATERIALS ISRAEL LTD·Filed 2005·Granted Nov 20, 2007·35 cites·14 claims
- 2892US10354376B2Technique for measuring overlay between layers of a multilayer structureAPPLIED MATERIALS ISRAEL LTD·Filed 2018·Granted Jul 16, 2019·5 cites·20 claims
- 2992US9805909B1Method for detecting voids in interconnects and an inspection systemAPPLIED MATERIALS ISRAEL LTD·Filed 2016·Granted Oct 31, 2017·7 cites·15 claims
- 3092US9535014B1Systems and methods for inspecting an objectAPPLIED MATERIALS ISRAEL LTD·Filed 2015·Granted Jan 3, 2017·8 cites·15 claims
- 3192US7683317B2Method and system for detecting hidden defectsAPPLIED MATERIALS ISRAEL LTD·Filed 2006·Granted Mar 23, 2010·17 cites·19 claims
- 3291US11205119B2Method of deep learning-based examination of a semiconductor specimen and system thereofAPPLIED MATERIALS ISRAEL LTD·Filed 2016·Granted Dec 21, 2021·11 cites·20 claims
- 3391US11035803B1Multi-perspective examination of a specimenAPPLIED MATERIALS ISRAEL LTD·Filed 2020·Granted Jun 15, 2021·3 cites·17 claims
- 3491US9818577B2Multi mode system with a dispersion X-ray detectorAPPLIED MATERIALS ISRAEL LTD·Filed 2016·Granted Nov 14, 2017·7 cites·17 claims
- 3591US7759642B2Pattern invariant focusing of a charged particle beamAPPLIED MATERIALS ISRAEL LTD·Filed 2008·Granted Jul 20, 2010·48 cites·18 claims
- 3690US11151710B1Automatic selection of algorithmic modules for examination of a specimenAPPLIED MATERIALS ISRAEL LTD·Filed 2020·Granted Oct 19, 2021·6 cites·17 claims
- 3790US7135344B2Design-based monitoringAPPLIED MATERIALS ISRAEL LTD·Filed 2004·Granted Nov 14, 2006·62 cites·25 claims
- 3889US11562476B2Determination of a simulated image of a specimenAPPLIED MATERIALS ISRAEL LTD·Filed 2020·Granted Jan 24, 2023·3 cites·15 claims
- 3989US9613255B2Systems, methods and computer program products for signature detectionAPPLIED MATERIALS ISRAEL LTD·Filed 2015·Granted Apr 4, 2017·11 cites·20 claims
- 4089US7521700B2Raster frame beam system for electron beam lithographyAPPLIED MATERIALS ISRAEL LTD·Filed 2006·Granted Apr 21, 2009·10 cites·12 claims
- 4189US7217579B2Voltage contrast test structureAPPLIED MATERIALS ISRAEL LTD·Filed 2002·Granted May 15, 2007·91 cites·20 claims
- 4288US11662324B1Three-dimensional surface metrology of wafersAPPLIED MATERIALS ISRAEL LTD·Filed 2022·Granted May 30, 2023·2 cites·20 claims
- 4388US11449977B2Generating training data usable for examination of a semiconductor specimenAPPLIED MATERIALS ISRAEL LTD·Filed 2020·Granted Sep 20, 2022·6 cites·18 claims
- 4488US11022565B2Process monitoringAPPLIED MATERIALS ISRAEL LTD·Filed 2019·Granted Jun 1, 2021·4 cites·13 claims
- 4588US10217621B2Cleanliness monitor and a method for monitoring a cleanliness of a vacuum chamberAPPLIED MATERIALS ISRAEL LTD·Filed 2017·Granted Feb 26, 2019·8 cites·22 claims
- 4688US9899185B1Resolving ambiguities in an energy spectrumAPPLIED MATERIALS ISRAEL LTD·Filed 2016·Granted Feb 20, 2018·9 cites·20 claims
- 4788US7233008B1Multiple electrode lens arrangement and a method for inspecting an objectAPPLIED MATERIALS ISRAEL LTD·Filed 2005·Granted Jun 19, 2007·12 cites·22 claims
- 4888US7105843B1Method and system for controlling focused ion beam alignment with a sampleAPPLIED MATERIALS ISRAEL LTD·Filed 2005·Granted Sep 12, 2006·12 cites·23 claims
- 4988US6899765B2Chamber elements defining a movable internal chamberAPPLIED MATERIALS ISRAEL LTD·Filed 2002·Granted May 31, 2005·59 cites·27 claims
- 5087US11543368B2X-ray based evaluation of a status of a structure of a substrateAPPLIED MATERIALS ISRAEL LTD·Filed 2021·Granted Jan 3, 2023·1 cites·20 claims
Showing the top 50 of 595 patent records by PatentIndex Score.
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