Assignee
APPLIED MICROWAVE PLASMA CONCE
US·7 granted patents·434 citations·filing 1985–1996
Top patents by PatentIndex Score
7 records- 0195US5370765AElectron cyclotron resonance plasma source and method of operationAPPLIED MICROWAVE PLASMA CONCE·Filed 1993·Granted Dec 6, 1994·118 cites·17 claims
- 0293US5203960AMethod of operation of electron cyclotron resonance plasma sourceAPPLIED MICROWAVE PLASMA CONCE·Filed 1992·Granted Apr 20, 1993·94 cites·17 claims
- 0392US5133826AElectron cyclotron resonance plasma sourceAPPLIED MICROWAVE PLASMA CONCE·Filed 1989·Granted Jul 28, 1992·93 cites·17 claims
- 0483US5707452ACoaxial microwave applicator for an electron cyclotron resonance plasma sourceAPPLIED MICROWAVE PLASMA CONCE·Filed 1996·Granted Jan 13, 1998·44 cites·25 claims
- 0582US4641060AMethod and apparatus using electron cyclotron heated plasma for vacuum pumpingAPPLIED MICROWAVE PLASMA CONCE·Filed 1985·Granted Feb 3, 1987·47 cites·18 claims
- 0676US5003225AMethod and apparatus for producing intense microwave pulsesAPPLIED MICROWAVE PLASMA CONCE·Filed 1989·Granted Mar 26, 1991·21 cites·42 claims
- 0771US4733133AMethod and apparatus for producing microwave radiationAPPLIED MICROWAVE PLASMA CONCE·Filed 1985·Granted Mar 22, 1988·17 cites·34 claims
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