Assignee
ARAI NORIAKI
JP·3 granted patents·1 pending application·14 citations·filing 2008–2011
Technology mixH01J4
Top patents by PatentIndex Score
4 records- 0187US8153966B2Electrode unit and charged particle beam deviceARAI NORIAKI·Filed 2009·Granted Apr 10, 2012·11 cites·17 claims
- 0275US8835884B2Charged particle beam apparatus with cleaning photo-irradiation apparatusARAI NORIAKI·Filed 2011·Granted Sep 16, 2014·3 cites·20 claims
- 0360US8698080B2Scanning electron microscopeARAI NORIAKI·Filed 2008·Granted Apr 15, 2014·0 cites·10 claims
- 0437US2012132802A1Gas field ionization ion source apparatus and scanning charged particle microscope equipped with sameARAI NORIAKI·Filed 2010·Application pending·0 cites
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