Assignee
ARNZ MICHAEL
DE·8 granted patents·11 citations·filing 2008–2012
Top patents by PatentIndex Score
8 records- 0181US8457411B2Method and device for determining the position of an edge of a marker structure with subpixel accuracy in an image, having a plurality of pixels, of the marker structureARNZ MICHAEL·Filed 2010·Granted Jun 4, 2013·4 cites·22 claims
- 0271US8218148B2Method and apparatus for measuring scattered light on an optical systemARNZ MICHAEL·Filed 2010·Granted Jul 10, 2012·2 cites·23 claims
- 0366US8260033B2Method and apparatus for determining the relative overlay shift of stacked layersARNZ MICHAEL·Filed 2008·Granted Sep 4, 2012·2 cites·11 claims
- 0463US8693805B2Determination of the relative position of two structuresARNZ MICHAEL·Filed 2010·Granted Apr 8, 2014·1 cites·21 claims
- 0551US9303975B2Method for determining the registration of a structure on a photomask and apparatus to perform the methodARNZ MICHAEL·Filed 2011·Granted Apr 5, 2016·0 cites·46 claims
- 0651US9229209B2Autofocus device and autofocusing method for an imaging deviceARNZ MICHAEL·Filed 2009·Granted Jan 5, 2016·2 cites·76 claims
- 0749US8731273B2Method and device for measuring the relative local position error of one of the sections of an object that is exposed section by sectionARNZ MICHAEL·Filed 2009·Granted May 20, 2014·0 cites·26 claims
- 0842US9014505B2Method and device for determining the position of a first structure relative to a second structure or a part thereofARNZ MICHAEL·Filed 2012·Granted Apr 21, 2015·0 cites·20 claims
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