Assignee
ASAKAWA TAKASHI
JP·2 granted patents·15 citations·filing 2009–2012
Top patents by PatentIndex Score
2 records- 0185US8255082B2Method for teaching carrier means, storage medium and substrate processing apparatusASAKAWA TAKASHI·Filed 2009·Granted Aug 28, 2012·15 cites·11 claims
- 0244US8457788B2Method for teaching carrier means, storage medium and substrate processing apparatusASAKAWA TAKASHI·Filed 2012·Granted Jun 4, 2013·0 cites·2 claims
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