Assignee
ASARI SATOSHI
JP·2 granted patents·1 pending application·9 citations·filing 2007–2009
Top patents by PatentIndex Score
3 records- 0178US8672602B2Vertical thermal processing apparatusASARI SATOSHI·Filed 2009·Granted Mar 18, 2014·7 cites·8 claims
- 0257US8940096B2Vertical thermal processing apparatus and substrate supporterASARI SATOSHI·Filed 2009·Granted Jan 27, 2015·2 cites·10 claims
- 0341US2007238062A1Vertical-type heat processing apparatus and method of controlling transfer mechanism in vertical-type heat processing apparatusASARI SATOSHI·Filed 2007·Application pending·0 cites
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