Assignee
ASM IP HOLDING B V
NL·7 granted patents·4 pending applications·0 citations·filing 2022–2025
Top patents by PatentIndex Score
11 records- 0189US12595555B2Toposelective vapor deposition using an inhibitorASM IP HOLDING B V·Filed 2024·Granted Apr 7, 2026·0 cites·20 claims
- 0289US2026100332A1Rf impedance matching with continuous wave and pulsing sourcesASM IP HOLDING B V·Filed 2025·Application pending·0 cites
- 0386US2026101701A1Apparatus and methods for cooling reaction chambers in semiconductor processing systemsASM IP HOLDING B V·Filed 2025·Application pending·0 cites
- 0478US2026098332A1Systems and methods for processing a silicon surface using multiple radical speciesASM IP HOLDING B V·Filed 2025·Application pending·0 cites
- 0575US2026100330A1Ignition for inductively coupled plasmaASM IP HOLDING B V·Filed 2025·Application pending·0 cites
- 0667US12598928B2Apparatus and methods for selectively etching silicon oxide filmsASM IP HOLDING B V·Filed 2022·Granted Apr 7, 2026·0 cites·12 claims
- 0761US12595557B2Method of forming structure including a doped adhesion filmASM IP HOLDING B V·Filed 2023·Granted Apr 7, 2026·0 cites·20 claims
- 0857US12595587B2Method and a substrate processing apparatus for forming an epitaxial stack on a plurality of substratesASM IP HOLDING B V·Filed 2023·Granted Apr 7, 2026·0 cites·9 claims
- 0956US12598946B2Fixtures and methods for positioning process kit components within reaction chambersASM IP HOLDING B V·Filed 2022·Granted Apr 7, 2026·0 cites·18 claims
- 1052US12595561B2Showerhead and substrate processing apparatus using the sameASM IP HOLDING B V·Filed 2022·Granted Apr 7, 2026·0 cites·20 claims
- 1146US12598943B2Wafer boat system, holder ring and use thereofASM IP HOLDING B V·Filed 2024·Granted Apr 7, 2026·0 cites·16 claims
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