Assignee

ASM KOREA LTD

KR·2 granted patents·2 citations·filing 2020–2022

Technology mixC01B2 C04B2 C23C2 H01L2 H10P2 H10W2

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2 records

0187US11261523B2Method of depositing silicon oxide filmsASM KOREA LTD·Filed 2020·Granted Mar 1, 2022·2 cites·17 claims
0274US12188121B2Method of depositing silicon oxide filmsASM KOREA LTD·Filed 2022·Granted Jan 7, 2025·0 cites·25 claims

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