Assignee
ASM LITHOGRAPHY
NL·5 granted patents·486 citations·filing 1990–1998
Top patents by PatentIndex Score
5 records- 0196US5801832AMethod of and device for repetitively imaging a mask pattern on a substrate using five measuring axesASM LITHOGRAPHY·Filed 1995·Granted Sep 1, 1998·181 cites·17 claims
- 0293US5100237AApparatus for projecting a mask pattern on a substrateASM LITHOGRAPHY·Filed 1990·Granted Mar 31, 1992·110 cites·34 claims
- 0390US5481362AApparatus for projecting a mask pattern on a substrateASM LITHOGRAPHY·Filed 1993·Granted Jan 2, 1996·84 cites·28 claims
- 0489US5602683ALens system with lens elements arranged in a gas-filled holder and photolithographic apparatus including such a systemASM LITHOGRAPHY·Filed 1994·Granted Feb 11, 1997·61 cites·4 claims
- 0585US6226075B1Supporting device provided with a gas spring with a gas bearing, and lithographic device provided with such supporting devicesASM LITHOGRAPHY·Filed 1998·Granted May 1, 2001·50 cites·21 claims
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