Assignee
ASM LITHOGRAPHY BV
NL·26 granted patents·1 pending application·4,854 citations·filing 1986–2001
Top patents by PatentIndex Score
27 records- 0198US6262796B1Positioning device having two object holdersASM LITHOGRAPHY BV·Filed 1998·Granted Jul 17, 2001·634 cites·11 claims
- 0298US6208407B1Method and apparatus for repetitively projecting a mask pattern on a substrate, using a time-saving height measurementASM LITHOGRAPHY BV·Filed 1998·Granted Mar 27, 2001·1k cites·19 claims
- 0398US6020964AInterferometer system and lithograph apparatus including an interferometer systemASM LITHOGRAPHY BV·Filed 1998·Granted Feb 1, 2000·478 cites·40 claims
- 0496US6384899B1Lithographic projection apparatusASM LITHOGRAPHY BV·Filed 2000·Granted May 7, 2002·103 cites·14 claims
- 0596US5969441ATwo-dimensionally balanced positioning device with two object holders, and lithographic device provided with such a positioning deviceASM LITHOGRAPHY BV·Filed 1997·Granted Oct 19, 1999·1.6k cites·14 claims
- 0692US6337484B1Positioning device and lithographic projection apparatus comprising such a deviceASM LITHOGRAPHY BV·Filed 1999·Granted Jan 8, 2002·91 cites·13 claims
- 0792US6297876B1Lithographic projection apparatus with an alignment system for aligning substrate on maskASM LITHOGRAPHY BV·Filed 1998·Granted Oct 2, 2001·255 cites·35 claims
- 0892US6160622AAlignment device and lithographic apparatus comprising such a deviceASM LITHOGRAPHY BV·Filed 1998·Granted Dec 12, 2000·105 cites·23 claims
- 0992US5144363AApparatus for and method of projecting a mask pattern on a substrateASM LITHOGRAPHY BV·Filed 1991·Granted Sep 1, 1992·112 cites·71 claims
- 1091US6388736B1Imaging method using phase boundary masking with modified illuminationASM LITHOGRAPHY BV·Filed 2000·Granted May 14, 2002·39 cites·51 claims
- 1190US6563564B2Method of operating an optical imaging system, lithographic projection apparatus, device manufacturing method, and device manufactured therebyASM LITHOGRAPHY BV·Filed 2001·Granted May 13, 2003·58 cites·22 claims
- 1283US6373552B1Optical correction plate, and its application in a lithographic projection apparatusASM LITHOGRAPHY BV·Filed 2000·Granted Apr 16, 2002·24 cites·11 claims
- 1382US6084673ALithographic apparatus for step-and-scan imaging of mask pattern with interferometer mirrors on the mask and wafer holdersASM LITHOGRAPHY BV·Filed 1997·Granted Jul 4, 2000·49 cites·15 claims
- 1478US6122058AInterferometer system with two wavelengths, and lithographic apparatus provided with such a systemASM LITHOGRAPHY BV·Filed 1998·Granted Sep 19, 2000·55 cites·24 claims
- 1576US6054784APositioning device having three coil systems mutually enclosing angles of 120° and lithographic device comprising such a positioning deviceASM LITHOGRAPHY BV·Filed 1998·Granted Apr 25, 2000·43 cites·12 claims
- 1674US6028660AIllumination unit for an optical apparatusASM LITHOGRAPHY BV·Filed 1996·Granted Feb 22, 2000·37 cites·27 claims
- 1770US6232615B1Lithographic projection apparatus with improved substrate holderASM LITHOGRAPHY BV·Filed 1999·Granted May 15, 2001·29 cites·9 claims
- 1866US5508528AIllumination unit having a facility for preventing contamination of optical components, and photolithographic apparatus including such an illumination unitASM LITHOGRAPHY BV·Filed 1994·Granted Apr 16, 1996·22 cites·6 claims
- 1959US4746800APositioning device comprising a z-manipulator and a θ-manipulatorASM LITHOGRAPHY BV·Filed 1986·Granted May 24, 1988·16 cites·11 claims
- 2057US6373072B1Lithographic projection apparatusASM LITHOGRAPHY BV·Filed 1999·Granted Apr 16, 2002·17 cites·11 claims
- 2157US6239862B1Photolithographic apparatusASM LITHOGRAPHY BV·Filed 2000·Granted May 29, 2001·4 cites·7 claims
- 2256US6067146APhotolithographic apparatusASM LITHOGRAPHY BV·Filed 1997·Granted May 23, 2000·14 cites·20 claims
- 2354US6296990B1Gas bearing and lithographic apparatus including such a bearingASM LITHOGRAPHY BV·Filed 1999·Granted Oct 2, 2001·13 cites·22 claims
- 2444US6362871B1Lithographic apparatusASM LITHOGRAPHY BV·Filed 1999·Granted Mar 26, 2002·8 cites·27 claims
- 2540US6348303B1Lithographic projection apparatusASM LITHOGRAPHY BV·Filed 1999·Granted Feb 19, 2002·9 cites·15 claims
- 2638US2002096647A1Mask handling apparatus, lithographic projection apparatus, device manufacturing method and device manufactured therebyASM LITHOGRAPHY BV·Filed 2001·Application pending·0 cites
- 2730US5889580AScanning-slit exposure deviceASM LITHOGRAPHY BV·Filed 1997·Granted Mar 30, 1999·1 cites·20 claims
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