Assignee

ASM MICROCHEMISTRY LTD

FI·2 granted patents·799 citations·filing 1998–2000

Technology mixC23C2 C30B2 Y10T1

Top patents by PatentIndex Score

2 records

0198US6416577B1Method for coating inner surfaces of equipmentASM MICROCHEMISTRY LTD·Filed 1998·Granted Jul 9, 2002·369 cites·28 claims
0296US6630030B1Method and apparatus for growing thin filmsASM MICROCHEMISTRY LTD·Filed 2000·Granted Oct 7, 2003·430 cites·12 claims

Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →