Assignee
ASML HOLDINGS N V
NL·14 granted patents·239 citations·filing 2000–2007
Top patents by PatentIndex Score
14 records- 0193US6678572B1Recipe cascading in a wafer processing systemASML HOLDINGS N V·Filed 2000·Granted Jan 13, 2004·69 cites·8 claims
- 0289US6662466B2Method for two dimensional adaptive process control of critical dimensions during spin coating processASML HOLDINGS N V·Filed 2001·Granted Dec 16, 2003·24 cites·48 claims
- 0388US6689215B2Method and apparatus for mitigating cross-contamination between liquid dispensing jets in close proximity to a surfaceASML HOLDINGS N V·Filed 2002·Granted Feb 10, 2004·35 cites·16 claims
- 0487US6694218B2Method and apparatus for resolving conflicts in a substrate processing systemASML HOLDINGS N V·Filed 2002·Granted Feb 17, 2004·41 cites·24 claims
- 0582US7081278B2Method for protection of adhesives used to secure optics from ultra-violet lightASML HOLDINGS N V·Filed 2002·Granted Jul 25, 2006·21 cites·4 claims
- 0678US7242464B2Method for characterizing optical systems using holographic reticlesASML HOLDINGS N V·Filed 2001·Granted Jul 10, 2007·14 cites·18 claims
- 0776US7084987B2Method and system to interferometrically detect an alignment markASML HOLDINGS N V·Filed 2004·Granted Aug 1, 2006·10 cites·16 claims
- 0869US7208262B2Yield and line width performance for liquid polymers and other materialsASML HOLDINGS N V·Filed 2004·Granted Apr 24, 2007·6 cites·5 claims
- 0958US7272976B2Pressure sensorASML HOLDINGS N V·Filed 2004·Granted Sep 25, 2007·8 cites·9 claims
- 1055US6865437B1Robot pre-positioning in a wafer processing systemASML HOLDINGS N V·Filed 2000·Granted Mar 8, 2005·4 cites·7 claims
- 1154US7199929B2Methods for optical beam shaping and diffusingASML HOLDINGS N V·Filed 2002·Granted Apr 3, 2007·3 cites·12 claims
- 1253US7602503B2Methods for measuring a wavefront of an optical systemASML HOLDINGS N V·Filed 2007·Granted Oct 13, 2009·0 cites·19 claims
- 1348US7531040B2Resist recovery methodASML HOLDINGS N V·Filed 2003·Granted May 12, 2009·2 cites·14 claims
- 1448US7242456B2System and method utilizing a lithography tool having modular illumination, pattern generator, and projection optics portionsASML HOLDINGS N V·Filed 2004·Granted Jul 10, 2007·2 cites·25 claims
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →