Assignee

ASML LITHOGRAPHY B V

NL·2 granted patents·43 citations·filing 1997–2002

Technology mixG03F2 B82Y1

Top patents by PatentIndex Score

2 records

0168US6927403B2Illumination system that suppresses debris from a light sourceASML LITHOGRAPHY B V·Filed 2002·Granted Aug 9, 2005·10 cites·29 claims
0265US5986742ALithographic scanning exposure projection apparatusASML LITHOGRAPHY B V·Filed 1997·Granted Nov 16, 1999·33 cites·6 claims

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