Assignee
ASML NETHERLAND BV
NL·5 granted patents·3 pending applications·211 citations·filing 2001–2025
Top patents by PatentIndex Score
8 records- 0197US6819425B2Lithographic apparatus, device manufacturing method, and device manufactured therebyASML NETHERLAND BV·Filed 2001·Granted Nov 16, 2004·186 cites·35 claims
- 0294US7965380B2Lithographic apparatus and device manufacturing methodASML NETHERLAND BV·Filed 2007·Granted Jun 21, 2011·21 cites·24 claims
- 0369US7894063B2Lithographic methodASML NETHERLAND BV·Filed 2008·Granted Feb 22, 2011·2 cites·18 claims
- 0469US2025155824A1Method for determining aberration sensitivity of patternsASML NETHERLAND BV·Filed 2025·Application pending·0 cites
- 0567US7862756B2Imprint lithographyASML NETHERLAND BV·Filed 2006·Granted Jan 4, 2011·2 cites·20 claims
- 0656US7804584B2Integrated circuit manufacturing methods with patterning device position determinationASML NETHERLAND BV·Filed 2008·Granted Sep 28, 2010·0 cites·20 claims
- 0745US2025085172A9Temperature measurement of optical elements in an optical apparatusASML NETHERLAND BV·Filed 2022·Application pending·0 cites
- 0843US2021357566A1Methods for generating characteristic pattern and training machine learning modelASML NETHERLAND BV·Filed 2019·Application pending·0 cites
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