Assignee

ASTEX PLASMAQUEST INC

US·2 granted patents·98 citations·filing 1998–1998

Technology mixH01J2

Top patents by PatentIndex Score

2 records

0189US6163006APermanent magnet ECR plasma source with magnetic field optimizationASTEX PLASMAQUEST INC·Filed 1998·Granted Dec 19, 2000·75 cites·7 claims
0267US6225592B1Method and apparatus for launching microwave energy into a plasma processing chamberASTEX PLASMAQUEST INC·Filed 1998·Granted May 1, 2001·23 cites·39 claims

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