Assignee

ATANASOFF GEORGE

US·1 granted patent·33 citations·filing 2010–2010

Technology mixA61P1 G01B1 G05B1 H01L1 H10F1 Y02E1

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0188US8918198B2Methods and systems for control of a surface modification processATANASOFF GEORGE·Filed 2010·Granted Dec 23, 2014·33 cites·44 claims

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