Assignee
ATOMEL CORP
4 granted patents·187 citations·filing 1977–1982
Top patents by PatentIndex Score
4 records- 0191US4427378AClosure and seal construction for high-pressure oxidation furnace and the likeATOMEL CORP·Filed 1982·Granted Jan 24, 1984·41 cites·3 claims
- 0288US4167915AHigh-pressure, high-temperature gaseous chemical apparatusATOMEL CORP·Filed 1977·Granted Sep 18, 1979·66 cites·7 claims
- 0382US4315479ASilicon wafer steam oxidizing apparatusATOMEL CORP·Filed 1980·Granted Feb 16, 1982·39 cites·3 claims
- 0481US4268538AHigh-pressure, high-temperature gaseous chemical method for silicon oxidationATOMEL CORP·Filed 1979·Granted May 19, 1981·41 cites·8 claims
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