Assignee
ATT ADVANCED TEMPERATURE TEST SYSTEMS GMBH
DE·1 granted patent·1 pending application·0 citations·filing 2020–2021
Top patents by PatentIndex Score
2 records- 0147US11821941B2Method for open-loop or closed-loop control of the temperature of a chuck for a wafer, temperature adjustment device, and wafer testing systemATT ADVANCED TEMPERATURE TEST SYSTEMS GMBH·Filed 2020·Granted Nov 21, 2023·0 cites·16 claims
- 0242US2023207346A1Temperature-control device, system, and method for controlling the temperature of a prober table for semiconductor wafers and/or hybridsATT ADVANCED TEMPERATURE TEST SYSTEMS GMBH·Filed 2021·Application pending·0 cites
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