Assignee
ATTOCUBE SYSTEMS AG
DE·12 granted patents·40 citations·filing 2001–2021
Top patents by PatentIndex Score
12 records- 0176US9829306B2Absolute distance laser interferometerATTOCUBE SYSTEMS AG·Filed 2014·Granted Nov 28, 2017·6 cites·14 claims
- 0274US6940210B2Inertial rotation deviceATTOCUBE SYSTEMS AG·Filed 2001·Granted Sep 6, 2005·30 cites·25 claims
- 0358US10825981B2Electromechanical actuatorATTOCUBE SYSTEMS AG·Filed 2018·Granted Nov 3, 2020·0 cites·15 claims
- 0455US10505470B2Stick-slip drive, especially piezo-actuated inertial driveATTOCUBE SYSTEMS AG·Filed 2015·Granted Dec 10, 2019·1 cites·13 claims
- 0552US7579752B2Positioning device with a solid-body jointATTOCUBE SYSTEMS AG·Filed 2007·Granted Aug 25, 2009·3 cites·16 claims
- 0650US12265288B2System for providing a magnetic field for a sampleATTOCUBE SYSTEMS AG·Filed 2021·Granted Apr 1, 2025·0 cites·10 claims
- 0749US10134975B2Electromechanical actuatorATTOCUBE SYSTEMS AG·Filed 2015·Granted Nov 20, 2018·0 cites·23 claims
- 0844US12270827B2Active bimodal AFM operation for measurements of optical interactionATTOCUBE SYSTEMS AG·Filed 2020·Granted Apr 8, 2025·0 cites·17 claims
- 0941US11899041B2Method for referencing a near-field measurement with drift and fluctuation correctionATTOCUBE SYSTEMS AG·Filed 2021·Granted Feb 13, 2024·0 cites·16 claims
- 1040US10794626B2Cooled tableATTOCUBE SYSTEMS AG·Filed 2015·Granted Oct 6, 2020·0 cites·9 claims
- 1134US11092512B2Optical tableATTOCUBE SYSTEMS AG·Filed 2015·Granted Aug 17, 2021·0 cites·15 claims
- 1227US10260863B2Interferometric displacement sensor for integration into machine tools and semiconductor lithography systemsATTOCUBE SYSTEMS AG·Filed 2015·Granted Apr 16, 2019·0 cites·13 claims
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →