Assignee
AUSSCHNITT CHRISTOPHER P
US·6 granted patents·32 citations·filing 2009–2011
Top patents by PatentIndex Score
6 records- 0194US8339605B2Multilayer alignment and overlay target and measurement methodAUSSCHNITT CHRISTOPHER P·Filed 2010·Granted Dec 25, 2012·11 cites·4 claims
- 0290US8107079B2Multi layer alignment and overlay target and measurement methodAUSSCHNITT CHRISTOPHER P·Filed 2010·Granted Jan 31, 2012·6 cites·19 claims
- 0387US8638438B2Self-calibrated alignment and overlay target and measurementAUSSCHNITT CHRISTOPHER P·Filed 2011·Granted Jan 28, 2014·5 cites·16 claims
- 0485US9097989B2Target and method for mask-to-wafer CD, pattern placement and overlay measurement and controlAUSSCHNITT CHRISTOPHER P·Filed 2009·Granted Aug 4, 2015·8 cites·15 claims
- 0571US8626328B2Discrete sampling based nonlinear control systemAUSSCHNITT CHRISTOPHER P·Filed 2011·Granted Jan 7, 2014·2 cites·13 claims
- 0642US9360858B2Alignment data based process control systemAUSSCHNITT CHRISTOPHER P·Filed 2011·Granted Jun 7, 2016·0 cites·25 claims
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