Assignee
AXCELIS TECHNOLOGIES
US·3 granted patents·130 citations·filing 2000–2001
Top patents by PatentIndex Score
3 records- 0189US6630406B2Plasma ashing processAXCELIS TECHNOLOGIES·Filed 2001·Granted Oct 7, 2003·50 cites·45 claims
- 0284US6610968B1System and method for controlling movement of a workpiece in a thermal processing systemAXCELIS TECHNOLOGIES·Filed 2000·Granted Aug 26, 2003·47 cites·44 claims
- 0383US6753506B2System and method of fast ambient switching for rapid thermal processingAXCELIS TECHNOLOGIES·Filed 2001·Granted Jun 22, 2004·33 cites·49 claims
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