Assignee
AXCELIS TECHNOLOGY INC
US·2 granted patents·36 citations·filing 2001–2007
Top patents by PatentIndex Score
2 records- 0179US6834656B2Plasma process for removing polymer and residues from substratesAXCELIS TECHNOLOGY INC·Filed 2001·Granted Dec 28, 2004·30 cites·21 claims
- 0276US7385799B1Offset phase operation on a multiphase AC electrostatic clampAXCELIS TECHNOLOGY INC·Filed 2007·Granted Jun 10, 2008·6 cites·25 claims
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