Assignee
AXCELLIS TECHNOLOGIES INC
US·2 granted patents·4 citations·filing 2000–2001
Top patents by PatentIndex Score
2 records- 0154US7247863B2System and method for rapidly controlling the output of an ion source for ion implantationAXCELLIS TECHNOLOGIES INC·Filed 2001·Granted Jul 24, 2007·3 cites·26 claims
- 0238US6485534B2Contaminant collector trap for ion implanterAXCELLIS TECHNOLOGIES INC·Filed 2000·Granted Nov 26, 2002·1 cites·13 claims
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →