Assignee
AYAZI FARROKH
US·16 granted patents·3 pending applications·225 citations·filing 2006–2012
Top patents by PatentIndex Score
19 records- 0194US9003882B1Vibratory tuning fork based six-degrees of freedom inertial measurement MEMS deviceAYAZI FARROKH·Filed 2011·Granted Apr 14, 2015·44 cites·19 claims
- 0294US8061201B2Readout method and electronic bandwidth control for a silicon in-plane tuning fork gyroscopeAYAZI FARROKH·Filed 2008·Granted Nov 22, 2011·43 cites·14 claims
- 0392US8450913B1Tunable Piezoelectric MEMS Resonators suitable for real-time clock applicationsAYAZI FARROKH·Filed 2011·Granted May 28, 2013·19 cites·20 claims
- 0492US8166816B2Bulk acoustic wave gyroscopeAYAZI FARROKH·Filed 2009·Granted May 1, 2012·43 cites·31 claims
- 0590US8680752B2Piezoelectric micromechanical energy harvestersAYAZI FARROKH·Filed 2012·Granted Mar 25, 2014·10 cites·33 claims
- 0689US8677821B2Readout method and electronic bandwidth control for a silicon in-plane tuning fork gyroscopeAYAZI FARROKH·Filed 2011·Granted Mar 25, 2014·14 cites·1 claims
- 0789US8528404B2Bulk acoustic wave accelerometersAYAZI FARROKH·Filed 2008·Granted Sep 10, 2013·14 cites·19 claims
- 0886US8624471B1Piezoelectric-on-semiconductor micromechanical resonators with linear acoustic bandgap tethersAYAZI FARROKH·Filed 2011·Granted Jan 7, 2014·11 cites·20 claims
- 0984US8061013B2Micro-electromechanical resonators having electrically-trimmed resonator bodies therein and methods of fabricating same using joule heatingAYAZI FARROKH·Filed 2009·Granted Nov 22, 2011·12 cites·9 claims
- 1070US9970764B2Bulk acoustic wave gyroscope with spoked structureAYAZI FARROKH·Filed 2010·Granted May 15, 2018·4 cites·29 claims
- 1170US8519598B1Microelectromechanical resonators having piezoelectric layers therein that support actuation and sensing through a longitudinal piezoelectric effectAYAZI FARROKH·Filed 2011·Granted Aug 27, 2013·3 cites·18 claims
- 1266US8242663B2Oscillator having micro-electromechanical resonators and driver circuits therein that support in-phase and out-of-phase signalsAYAZI FARROKH·Filed 2011·Granted Aug 14, 2012·2 cites·3 claims
- 1365US8063720B2MEMS resonators having resonator bodies therein with concave-shaped sides that support high quality factor and low temperature coefficient of resonant frequencyAYAZI FARROKH·Filed 2009·Granted Nov 22, 2011·4 cites·14 claims
- 1460US9726489B2Mode-matched single proof-mass dual-axis gyroscope and method of fabricationAYAZI FARROKH·Filed 2011·Granted Aug 8, 2017·2 cites·37 claims
- 1547US9319020B2Temperature compensation in a semiconductor micromechanical resonator via charge carrier depletionAYAZI FARROKH·Filed 2011·Granted Apr 19, 2016·0 cites·18 claims
- 1647US9154108B2Self-polarized capacitive micromechanical resonator apparatus and fabrication methodAYAZI FARROKH·Filed 2011·Granted Oct 6, 2015·0 cites·16 claims
- 1741US2007001267A1Methods of forming oxide masks with submicron openings and microstructures formed therebyAYAZI FARROKH·Filed 2006·Application pending·0 cites
- 1840US2006273416A1Capacitive resonatorsAYAZI FARROKH·Filed 2006·Application pending·0 cites
- 1937US2008054759A1Wafer-level encapsulation and sealing of electrostatic transducersAYAZI FARROKH·Filed 2007·Application pending·0 cites
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