Assignee
AZ ELECTRONIC MATERIALS LUXEMBOURG SARL
LU·3 granted patents·4 pending applications·14 citations·filing 2013–2015
Top patents by PatentIndex Score
7 records- 0189US9274426B2Antireflective coating compositions and processes thereofAZ ELECTRONIC MATERIALS LUXEMBOURG SARL·Filed 2014·Granted Mar 1, 2016·12 cites·20 claims
- 0273US9164386B2Negative-working photosensitive siloxane compositionAZ ELECTRONIC MATERIALS LUXEMBOURG SARL·Filed 2013·Granted Oct 20, 2015·2 cites·12 claims
- 0354US2015227043A1Bottom antireflective materials and compositionsAZ ELECTRONIC MATERIALS LUXEMBOURG SARL·Filed 2015·Application pending·0 cites
- 0443US2015140490A1Overlay film forming composition and resist pattern formation method using sameAZ ELECTRONIC MATERIALS LUXEMBOURG SARL·Filed 2013·Application pending·0 cites
- 0543US2015309403A1Antireflective coating compositions and processes thereofAZ ELECTRONIC MATERIALS LUXEMBOURG SARL·Filed 2014·Application pending·0 cites
- 0642US2016122580A1Defect reduction methods and composition for via formation in directed self-assembly patterningAZ ELECTRONIC MATERIALS LUXEMBOURG SARL·Filed 2014·Application pending·0 cites
- 0736US9328198B2Composition for forming resist underlayerAZ ELECTRONIC MATERIALS LUXEMBOURG SARL·Filed 2014·Granted May 3, 2016·0 cites·5 claims
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