Assignee
BABBS DANIEL
US·3 granted patents·57 citations·filing 2007–2012
Top patents by PatentIndex Score
3 records- 0195US9105673B2Side opening unified podBABBS DANIEL·Filed 2008·Granted Aug 11, 2015·41 cites·18 claims
- 0285US8827618B2Transport systemBABBS DANIEL·Filed 2012·Granted Sep 9, 2014·7 cites·20 claims
- 0384US8297319B2Carrier gas system and coupling substrate carrier to a loadportBABBS DANIEL·Filed 2007·Granted Oct 30, 2012·9 cites·8 claims
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