Assignee
BABICH KATHERINA E
US·3 granted patents·1 pending application·18 citations·filing 2008–2012
Top patents by PatentIndex Score
4 records- 0191US8497212B2Filling narrow openings using ion beam etchBABICH KATHERINA E·Filed 2011·Granted Jul 30, 2013·15 cites·24 claims
- 0264US8754530B2Self-aligned borderless contacts for high density electronic and memory device integrationBABICH KATHERINA E·Filed 2008·Granted Jun 17, 2014·3 cites·7 claims
- 0348US9099537B2Selective nanotube growth inside vias using an ion beamBABICH KATHERINA E·Filed 2009·Granted Aug 4, 2015·0 cites·20 claims
- 0446US2012299101A1Thin body silicon-on-insulator transistor with borderless self-aligned contactsBABICH KATHERINA E·Filed 2012·Application pending·0 cites
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