Assignee

BACKUES MARK

US·1 granted patent·0 citations·filing 2014–2014

Technology mixG01B1 G01M1 G01N1 G03F1 G06F1 H05K1

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0140US10481088B2Automatic determination of fourier harmonic order for computation of spectral information for diffraction structuresBACKUES MARK·Filed 2014·Granted Nov 19, 2019·0 cites·29 claims

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