Assignee
BAILEY III ANDREW D
US·9 granted patents·51 citations·filing 2006–2012
Top patents by PatentIndex Score
9 records- 0193US8580078B2Bevel etcher with vacuum chuckBAILEY III ANDREW D·Filed 2007·Granted Nov 12, 2013·20 cites·11 claims
- 0291US8225683B2Wafer bow metrology arrangements and methods thereofBAILEY III ANDREW D·Filed 2008·Granted Jul 24, 2012·15 cites·20 claims
- 0385US9053925B2Configurable bevel etcherBAILEY III ANDREW D·Filed 2011·Granted Jun 9, 2015·6 cites·13 claims
- 0481US8414790B2Bevel plasma treatment to enhance wet edge cleanBAILEY III ANDREW D·Filed 2010·Granted Apr 9, 2013·5 cites·14 claims
- 0577US8764907B2Servicing a plasma processing system with a robotBAILEY III ANDREW D·Filed 2009·Granted Jul 1, 2014·4 cites·20 claims
- 0663US8211238B2System, method and apparatus for self-cleaning dry etchBAILEY III ANDREW D·Filed 2006·Granted Jul 3, 2012·1 cites·16 claims
- 0756US8268116B2Methods of and apparatus for protecting a region of process exclusion adjacent to a region of process performance in a process chamberBAILEY III ANDREW D·Filed 2007·Granted Sep 18, 2012·0 cites·5 claims
- 0853US8440051B2Plasma processing chamber for bevel edge processingBAILEY III ANDREW D·Filed 2011·Granted May 14, 2013·0 cites·17 claims
- 0951US9123582B2Methods of in-situ measurements of wafer bowBAILEY III ANDREW D·Filed 2012·Granted Sep 1, 2015·0 cites·13 claims
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