Assignee

BALAKRISHNA AJIT

US·2 granted patents·30 citations·filing 2008–2009

Technology mixC23C1 H01J1 H10P1

Top patents by PatentIndex Score

2 records

0192US8075728B2Gas flow equalizer plate suitable for use in a substrate process chamberBALAKRISHNA AJIT·Filed 2008·Granted Dec 13, 2011·28 cites·9 claims
0275US8398814B2Tunable gas flow equalizerBALAKRISHNA AJIT·Filed 2009·Granted Mar 19, 2013·2 cites·20 claims

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