Assignee
BAO LIYUAN
US·2 granted patents·116 citations·filing 2010–2012
Top patents by PatentIndex Score
2 records- 0192US8691023B2Methods and apparatus for cleaning deposition chamber parts using selective spray etchBAO LIYUAN·Filed 2012·Granted Apr 8, 2014·116 cites·10 claims
- 0243US8398779B2Non destructive selective deposition removal of non-metallic deposits from aluminum containing substratesBAO LIYUAN·Filed 2010·Granted Mar 19, 2013·0 cites·8 claims
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