Assignee

BARBE JEAN-CHARLES

FR·1 granted patent·4 citations·filing 2007–2007

Technology mixB01L1 B81B1 B81C1

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0166US8236698B2Method for forming non-aligned microcavities of different depthsBARBE JEAN-CHARLES·Filed 2007·Granted Aug 7, 2012·4 cites·8 claims

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