Assignee

BASS JOHN DAVID

US·1 granted patent·39 citations·filing 2012–2012

Technology mixC07C1 C07F1 G03F1

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0195US8703386B2Metal peroxo compounds with organic co-ligands for electron beam, deep UV and extreme UV photoresist applicationsBASS JOHN DAVID·Filed 2012·Granted Apr 22, 2014·39 cites·14 claims

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