Assignee
BECKERS MARCEL
NL·5 granted patents·4 citations·filing 2008–2011
Technology mixG03F5
Top patents by PatentIndex Score
5 records- 0177US8976334B2Lithographic apparatus and device manufacturing methodBECKERS MARCEL·Filed 2011·Granted Mar 10, 2015·1 cites·22 claims
- 0269US8462314B2Lithographic apparatus and device manufacturing methodBECKERS MARCEL·Filed 2008·Granted Jun 11, 2013·3 cites·28 claims
- 0360US8988651B2Lithographic apparatus and device manufacturing methodBECKERS MARCEL·Filed 2011·Granted Mar 24, 2015·0 cites·22 claims
- 0459US8259287B2Lithographic apparatus and device manufacturing methodBECKERS MARCEL·Filed 2008·Granted Sep 4, 2012·0 cites·22 claims
- 0555US8958054B2Lithographic apparatus and device manufacturing methodBECKERS MARCEL·Filed 2011·Granted Feb 17, 2015·0 cites·20 claims
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